http://ir-heat-china.com/zh/tags/%E5%88%86%E5%8C%BA/ Recent content in 分区 on China Infrared Heating Manufacturer Hugo zh Tue, 30 Jun 2026 05:21:51 +0800 http://ir-heat-china.com/zh/posts/zoned-heating-for-advanced-wafer-fab/ Tue, 30 Jun 2026 05:21:51 +0800 http://ir-heat-china.com/zh/posts/zoned-heating-for-advanced-wafer-fab/ <p><img src="http://ir-heat-china.com/images/016cf4f616aaa15e4af48856b8adc51b.png" alt="先进的晶圆制造厂分区供暖系统"></p> <p>在芯片制造过程中，如果晶圆表面的温度出现0.3°C的波动，就足以导致光刻精度下降、层间对位不准，还会使光阻材料超出其耐受温度范围。此时不会有任何警示信号，只能将晶圆废弃，同时还需要立即联系光刻团队进行处理。</p>